Read e-book online Feedback Control of MEMS to Atoms PDF

By Jason J. Gorman, Benjamin Shapiro

ISBN-10: 1441958312

ISBN-13: 9781441958310

ISBN-10: 1441958320

ISBN-13: 9781441958327

Control from MEMS to Atoms illustrates using keep an eye on and regulate structures as a necessary a part of functioning built-in structures. The publication is equipped in line with the dimensional scale of the matter, beginning with micro-scale structures and finishing with atomic-scale structures. just like macro-scale machines and techniques, regulate structures can play an immense function in bettering the functionality of micro- and nano-scale platforms and in permitting new functions that may in a different way now not be attainable. notwithstanding, the vast majority of difficulties at those scales current many new demanding situations that transcend the present state of the art up to the mark engineering. it is a results of the multidisciplinary nature of micro/nanotechnology, which calls for the merging of keep an eye on engineering with physics, biology and chemistry.

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Shinnar, and S. Katz. The stability and dynamic behavior of a continuous crystallizer with a fines trap. , 17:1459–1470, 1971. 40. M. D. Christofides. Modeling and analysis of HVOF thermal spray process accounting for powder size distribution. Chem. Eng. , 58:849–857, 2003. 41. M. D. Christofides. Feedback control of HVOF thremal spray process accounting for powder size distribution. J. Therm. , 13:108–120, 2004. 42. M. D. Christofides. Multi-scale modeling and analysis of HVOF thermal spray process.

Eng. , 187:229–249, 2001. 71. D. J. G. McCartney. Microstructure formation and corrosion behaviour in HVOF-sprayed Inconel 625 coatings. Mat. Sci. Eng. A, 344:45–56, 2003. 72. P. Zhang, and S. Rohani. On-line optimal control of a seeded batch cooling crystallizer. Chem. Eng. , 58:1887–1896, 2003. Chapter 3 In Situ Optical Sensing and State Estimation for Control of Surface Processing Rentian Xiong and Martha A. 1 Introduction Measuring surface properties during modification is challenging, since the surface cannot be directly contacted, as that would disrupt the surface being modified.

Thus, it is not possible to infer the temperature based on an ex situ measured surface emissivity. One solution that has been proposed is to additionally estimate the surface emissivity in real-time, using a normal incidence reflection measurement. This combination is referred to as the emissivity correcting pyrometer (ECP) [11] and has been successfully used for closed-loop temperature control of a chemical vapor deposition process [12]. The ECP measurement relies on a reflection measurement of the surface, such that a single-wavelength unpolarized beam of light is directed at the surface at normal incidence.

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Feedback Control of MEMS to Atoms by Jason J. Gorman, Benjamin Shapiro


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